Recent development and futuristic applications of MEMS based piezoelectric microphones
نویسندگان
چکیده
This paper presents a comprehensive literature survey of MEMS based piezoelectric microphones along with the fabrication processes involved, application domains, and methodologies used for experimentations. Advantages limitations existing are presented impact process parameters during thin film growth. review identifies issues faced by microphone technologies spanning from invention to most recent state-of-the-art solutions implemented overcome or address them. A detailed comparison performance in terms sensitivity dynamic range is here that can be decide material develop sensors on bandwidth requirement. Electrical mechanical properties different materials such as AlN, ZnO, quartz, PZT, PVDF, other polymers has great potential sensing membrane development deployment these complications fabrication. Insights future emerging domains also discussed.
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ژورنال
عنوان ژورنال: Sensors and Actuators A-physical
سال: 2022
ISSN: ['0924-4247', '1873-3069']
DOI: https://doi.org/10.1016/j.sna.2022.113887